Sorption-enhanced thin film composites with metal-organic polyhedral nanocages for CO2 separation

Metal-organic thin-film encapsulation for MEMS

This paper demonstrates a metal-organic thin-film encapsulation technique based on the photolithography of multiple layers of positive-tone photo-definable polymer. This encapsulation process, performed at low temperatures (<110 ◦C) in a standard basic developer, leaves no residue. Piezoelectrically-actuated length-extensional bulk acoustic wave resonators were successfully encapsulated for a p...

Metal-organic framework thin film for enhanced localized surface plasmon resonance gas sensing.

Despite its high refractive index sensitivity, localized surface plasmon resonance (LSPR) spectroscopy has been generally restricted to large biological analytes. Sensing of smaller molecules is a compelling target for this technique; in particular, LSPR spectroscopy could be utilized to detect hazardous or toxic gases and manage industrial processes involving gaseous chemicals. Here, we report...

Metal-organic Thin-film Encapsula- Tion for Gravimetric Gas Microsensors

Here we demonstrate a novel metal-organic thin-film encapsulation technique for resonant gas microsensors to efficiently filter out airborne particles which can negatively affect device performance. The gravimetric sensors are ZnO-on-silicon extensional mode resonators coated with a gas-sensitive material. Mass change caused by chemical reaction and/or physical adsorption can be detected throug...

Enhanced CO2 sorption and selectivity by functionalization of a NbO-type metal-organic framework with polarized benzothiadiazole moieties.

A new NbO-type metal-organic framework ZJNU-40 incorporating highly polarized benzothiadiazole moieties exhibits a high CO2 uptake of 108 cm(3) g(-1) at 296 K and 1 atm, as well as good adsorption selectivities of CO2 over CH4 and N2 at room temperature, which is superior to that of the analogous MOF NOTT-101.

Thin film shape memory composites